Two modes of laser lithography fabrication of three-dimensional submicrometer structures
Crossref DOI link: https://doi.org/10.1134/S1063783414110262
Published Online: 2014-11-06
Published Print: 2014-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shishkin, I. I.
Samusev, K. B.
Rybin, M. V.
Limonov, M. F.
Kiyan, R. V.
Chichkov, B. N.
Kivshar’, Yu. S.
Belov, P. A.
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