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Optical monitoring of the deposition process of ferroelectric films

Crossref DOI link: https://doi.org/10.1134/S1063783415070021

Published Online: 2015-07-07

Published Print: 2015-07

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Afanas’ev, M. S.

Nabiev, A. E.

Chucheva, G. V.
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Text and Data Mining valid from 2015-07-01

Version of Record valid from 2015-07-01
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Article History

Received: 19 August 2014

Accepted: 20 December 2014

First Online: 7 July 2015