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Prevention of AlN crystal from cracking on SiC substrates by evaporation of the substrates

Crossref DOI link: https://doi.org/10.1134/S1063783415120057

Published Online: 2015-12-15

Published Print: 2015-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Argunova, T. S.

Gutkin, M. Yu.

Mokhov, E. N.

Kazarova, O. P.

Lim, J.-H.

Shcheglov, M. P.
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