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Surface State Variation during Scanning in a Low-Voltage SEM and Its Effect on of Relief Structure Sizes

Published Online: 2020-06-10

Published Print: 2020-06

Authors

Larionov, Yu. V.

Ozerin, Yu. V.
License Information

Text and Data Mining valid from 2020-06-01

Version of Record valid from 2020-06-01
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Article History

Received: 16 October 2019

Revised: 21 January 2020

Accepted: 21 January 2020

First Online: 10 June 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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