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Combine XPS and AFM Study of Silicon Oxide Film with Zinc Impurity for ReRAM Devices

Published Online: 2022-06-29

Published Print: 2022-03

Authors

Privezentsev, V. V.

Sergeev, A. P.

Firsov, A. A.

Kiselev, D. A.
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Text and Data Mining valid from 2022-03-01

Version of Record valid from 2022-03-01
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Article History

Received: 21 January 2022

Revised: 21 January 2022

Accepted: 22 January 2022

First Online: 29 June 2022

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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