Crossmark

Effect of the Thickness on the Resistivity of Thin Diamond-like Carbon Coatings on Silicon Substrate

Published Online: 2023-03-02

Published Print: 2022-11

Authors

Zur, I. A.

Shmanai, Y. E.

Fedotova, Yu. A.

Kharchenko, A. A.

Movchan, S. A.
License Information

Text and Data Mining valid from 2022-11-01

Version of Record valid from 2022-11-01
More Information

Article History

Received: 26 August 2022

Revised: 26 August 2022

Accepted: 3 September 2022

First Online: 2 March 2023

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

Document is current