Joint functioning of a magnetron sputtering system and an end-hall ion source
Crossref DOI link: https://doi.org/10.1134/S1063784214090096
Published Online: 2014-09-20
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Golosov, D. A.
Eungsun, Byon
Zavadski, S. M.
Text and Data Mining valid from 2014-09-01
