Rate of localized gas discharge etching of silicon
Crossref DOI link: https://doi.org/10.1134/S106378421410003X
Published Online: 2014-10-15
Published Print: 2014-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Abramov, A. V.
Pankratova, E. A.
Surovtsev, I. S.
Text and Data Mining valid from 2014-10-01