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Formation of InAs nanoclusters in silicon by high-dose ion implantation: Experimental data and simulation results

Published Online: 2015-09-16

Published Print: 2015-09

Authors

Komarov, A. F.

Komarov, F. F.

Mil’chanin, O. V.

Vlasukova, L. A.

Parkhomenko, I. N.

Mikhailov, V. V.

Mokhovikov, M. A.

Miskevich, S. A.
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Text and Data Mining valid from 2015-09-01

Version of Record valid from 2015-09-01
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Article History

Received: 30 July 2014

First Online: 16 September 2015

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