Method to control the optical parameters of thin transparent films using angle optical reflectometry
Crossref DOI link: https://doi.org/10.1134/S1063784215100035
Published Online: 2015-11-05
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Aliev, I. M.
Zinchenko, S. P.
Kovtun, A. P.
Tolmachev, G. N.
Pavlenko, A. V.
Text and Data Mining valid from 2015-10-01