Violation of the boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges
Crossref DOI link: https://doi.org/10.1134/S1063784215100084
Published Online: 2015-11-05
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Bogdanov, E. A.
Kudryavtsev, A. A.
Ochikova, Z. S.
Chirtsov, A. S.
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