Composition and properties of nanoscale Si structures formed on the CoSi2/Si(111) surface by Ar+ ion bombardment
Crossref DOI link: https://doi.org/10.1134/S1063784217050103
Published Online: 2017-05-25
Published Print: 2017-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ergashov, Y. S.
License valid from 2017-05-01