Atomic Layer Deposition of Thin Films onto 3D Nanostructures: The Effect of Wall Tilt Angle and Aspect Ratio of Trenches
Crossref DOI link: https://doi.org/10.1134/S1063784218100092
Published Online: 2018-10-15
Published Print: 2018-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fadeev, A. V.
Rudenko, K. V.
Text and Data Mining valid from 2018-10-01
Article History
Received: 10 November 2017
First Online: 15 October 2018