Model for Thermal Oxidation of Silicon
Crossref DOI link: https://doi.org/10.1134/S1063784219040108
Published Online: 2019-05-15
Published Print: 2019-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fadeev, A. V.
Devyatko, Yu. N.
Text and Data Mining valid from 2019-04-01
Version of Record valid from 2019-04-01
Article History
Received: 26 April 2018
Accepted: 28 September 2018
First Online: 15 May 2019