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Modification of the Surface Properties of Free Si–Cu Films by Implantation of Active Metal Ions

Published Online: 2020-04-22

Published Print: 2020-01

Authors

Isakhanov, Z. A.

Kosimov, I. O.

Umirzakov, B. E.

Erkulov, R. M.
License Information

Text and Data Mining valid from 2020-01-01

Version of Record valid from 2020-01-01
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Article History

Received: 20 May 2019

Revised: 20 May 2019

Accepted: 3 June 2019

First Online: 22 April 2020

CONFLICT OF INTEREST

: The authors claim that they do not have any conflicts of interest.

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