Crossmark

Secondary-Ion Mass Spectroscopy for Analysis of the Implanted Hydrogen Profile in Silicon and Impurity Composition of Silicon-on-Insulator Structures

Published Online: 2020-11-18

Published Print: 2020-11

Authors

Abrosimova, N. D.

Drozdov, M. N.

Obolensky, S. V.
License Information

Text and Data Mining valid from 2020-11-01

Version of Record valid from 2020-11-01
More Information

Article History

Received: 3 April 2020

Revised: 3 April 2020

Accepted: 3 April 2020

First Online: 18 November 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

Document is current