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Plastic Relaxation of Stressed Semipolar AlN($$10\bar {1}1$$) Layer Synthesized on a Nanopatterned Si(100) Substrate

Published Online: 2020-12-11

Published Print: 2020-12

Authors

Bessolov, V. N.

Konenkova, E. V.

Panteleev, V. N.
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Text and Data Mining valid from 2020-12-01

Version of Record valid from 2020-12-01
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Article History

Received: 25 March 2020

Revised: 15 June 2020

Accepted: 30 June 2020

First Online: 11 December 2020

CONFLICT OF INTEREST

: The author declare that they have no conflicts of interest.

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