Determination of Silicon Carbide Structures Layer Thicknesses using Reflection Spectra Frequency Analysis
Crossref DOI link: https://doi.org/10.1134/S1063784221050182
Published Online: 2022-02-11
Published Print: 2021-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Panov, M. F.
Pavlova, M. V.
Text and Data Mining valid from 2021-06-01
Version of Record valid from 2021-06-01
Article History
Received: 22 September 2020
Revised: 3 December 2020
Accepted: 7 December 2020
First Online: 11 February 2022
CONFLICT OF INTEREST
: The authors declare that they have no conflicts of interest.