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Physical Processes in the Pirani Type Low Vacuum Sensor

Published Online: 2024-03-15

Published Print: 2023-12

Authors

Rut’kov, E. V.

Beliaeva, O. A.

Gall, N. R.
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Text and Data Mining valid from 2023-12-01

Version of Record valid from 2023-12-01
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Article History

Received: 21 July 2022

Revised: 17 November 2022

Accepted: 17 November 2022

First Online: 15 March 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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