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Technique for Investigation of the Shape Changes of Wafers and Thin-Film Membranes by Using Geomorphometric Approaches

Published Online: 2024-09-02

Published Print: 2024-02

Authors

Dedkova, A. A.

Florinsky, I. V.

Djuzhev, N. A.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 16 April 2022

Revised: 16 April 2022

Accepted: 16 April 2022

First Online: 2 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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