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Ion-Beam Lithography: Modelling and Analytical Description of the Deposited in Resist Energy

Published Online: 2024-09-02

Published Print: 2024-02

Authors

Shabelnikova, Ya. L.

Zaitsev, S. I.
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Text and Data Mining valid from 2024-02-01

Version of Record valid from 2024-02-01
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Article History

Received: 25 April 2022

Revised: 25 April 2022

Accepted: 25 April 2022

First Online: 2 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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