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Formation of Germanium Nanocrystals and Amorphous Nanoclusters in GeO[SiO] and GeO[SiO2] Films Using Electron Beam Annealing

Published Online: 2024-09-07

Published Print: 2024-04

Authors

Konstantinov, V. O.

Baranov, E. A.

Fan, Zhang

Shchukin, V. G.

Zamchiy, A. O.

Volodin, V. A.
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Text and Data Mining valid from 2024-04-01

Version of Record valid from 2024-04-01
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Article History

Received: 9 February 2022

Revised: 13 May 2022

Accepted: 17 May 2022

First Online: 7 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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