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Molecular Dynamics Study of Reversible Relaxation of Compressive Mechanical Stress in Polycrystalline Metal Films after the Interruption of Their Deposition

Crossref DOI link: https://doi.org/10.1134/S1063784224040017

Published Online: 2024-09-20

Published Print: 2024-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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