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Project of X-Ray Optical Scheme of a Lithograph with a Transmissive Dynamic Mask and a Synchrotron Radiation Source

Published Online: 2024-09-27

Published Print: 2024-07

Authors

Malyshev, I. V.

Chkhalo, N. I.

Yakunin, S. N.
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Text and Data Mining valid from 2024-07-01

Version of Record valid from 2024-07-01
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Article History

Received: 3 May 2023

Revised: 3 May 2023

Accepted: 3 May 2023

First Online: 27 September 2024

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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