Formation of carbon subnanosize masking coatings on silicon (100) in low-pressure microwave plasma
Crossref DOI link: https://doi.org/10.1134/S1063785014040130
Published Online: 2014-05-14
Published Print: 2014-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Yafarov, R. K.
Shanygin, V. Ya.
Text and Data Mining valid from 2014-04-01