The formation of shallow-donor distribution profiles in proton irradiation of silicon
Crossref DOI link: https://doi.org/10.1134/S1063785014120086
Published Online: 2015-01-09
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Grekhov, I. V.
Kostina, L. S.
Lomasov, V. N.
Yusupova, Sh. A.
Belyakova, E. I.
Text and Data Mining valid from 2014-12-01