Simulation of material sputtering with a focused ion beam
Crossref DOI link: https://doi.org/10.1134/S106378501506019X
Published Online: 2015-07-14
Published Print: 2015-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Borgardt, N. I.
Volkov, R. L.
Rumyantsev, A. V.
Chaplygin, Yu. A.
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