The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase
Crossref DOI link: https://doi.org/10.1134/S1063785015070214
Published Online: 2015-08-02
Published Print: 2015-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ivashchenko, V. I.
Pogrebnjak, A. D.
Sobol’, O. V.
Rogoz, V. N.
Meilekhov, A. A.
Dub, S. N.
Kupchishin, A. I.
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