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Doping silicon with erbium by recoil implantation

Crossref DOI link: https://doi.org/10.1134/S1063785015080209

Published Online: 2015-09-02

Published Print: 2015-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Feklistov, K. V.

Abramkin, D. S.

Obodnikov, V. I.

Popov, V. P.
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Text and Data Mining valid from 2015-08-01

Version of Record valid from 2015-08-01
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Article History

Received: 2 March 2015

First Online: 2 September 2015