Synthesis of a-SiO x : H thin films by the gas-jet electron beam plasma chemical vapor deposition method
Crossref DOI link: https://doi.org/10.1134/S1063785015100181
Published Online: 2015-11-05
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Baranov, E. A.
Zamchiy, A. O.
Khmel, S. Ya.
Text and Data Mining valid from 2015-10-01
Version of Record valid from 2015-10-01
Article History
Received: 21 May 2015
First Online: 5 November 2015