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The influence of growth conditions on the surface morphology and development of mechanical stresses in Al(Ga)N layers during metalorganic vapor phase epitaxy

Crossref DOI link: https://doi.org/10.1134/S1063785016040192

Published Online: 2016-05-20

Published Print: 2016-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Lundin, W. V.

Zavarin, E. E.

Brunkov, P. N.

Yagovkina, M. A.

Troshkov, S. I.

Sakharov, A. V.

Nikolaev, A. E.

Tsatsulnikov, A. F.
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Article History

Received: 12 November 2015

First Online: 20 May 2016

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