Low-temperature diffusion of implanted sodium in silicon
Crossref DOI link: https://doi.org/10.1134/S1063785016040295
Published Online: 2016-05-20
Published Print: 2016-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zastavnoi, A. V.
Korol’, V. M.
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