Electrophysical properties of Si/SiO2 nanostructures fabricated by direct bonding
Crossref DOI link: https://doi.org/10.1134/S1063785016060079
Published Online: 2016-07-21
Published Print: 2016-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Gismatulin, A. A.
Kamaev, G. N.
License valid from 2016-06-01