Ion plasma deposition of oxide films with graded-stoichiometry composition: Experiment and simulation
Crossref DOI link: https://doi.org/10.1134/S1063785016070300
Published Online: 2016-08-12
Published Print: 2016-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Volpyas, V. A.
Tumarkin, A. V.
Mikhailov, A. K.
Kozyrev, A. B.
Platonov, R. A.
Text and Data Mining valid from 2016-07-01
Version of Record valid from 2016-07-01
Article History
Received: 9 November 2015
First Online: 12 August 2016