The effect of diborane additive on the plasma-chemical properties of deposited carbon films
Crossref DOI link: https://doi.org/10.1134/S1063785017010114
Published Online: 2017-02-17
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Shubina, E. N.
Karasev, P. A.
Titov, A. I.
Podsvirov, O. A.
Vinogradov, A. Ya.
Karasev, N. N.
Pozdnyakov, A. V.
License valid from 2017-01-01