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Dislocation-related photoluminescence in silicon implanted with fluorine ions

Published Online: 2017-02-17

Published Print: 2017-01

Authors

Sobolev, N. A.

Kalyadin, A. E.

Sakharov, V. I.

Serenkov, I. T.

Shek, E. I.

Karabeshkin, K. V.

Karasev, P. A.

Titov, A. I.
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Article History

Received: 15 July 2016

First Online: 17 February 2017

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