Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
Crossref DOI link: https://doi.org/10.1134/S1063785017010138
Published Online: 2017-02-17
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tarala, V. A.
Altakhov, A. S.
Ambartsumov, M. G.
Martens, V. Ya.
License valid from 2017-01-01