Polishing superhard material surfaces with gas-cluster ion beams
Crossref DOI link: https://doi.org/10.1134/S1063785017010205
Published Online: 2017-02-17
Published Print: 2017-01
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ieshkin, A. E.
Kushkina, K. D.
Kireev, D. S.
Ermakov, Yu. A.
Chernysh, V. S.
License valid from 2017-01-01