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Monitoring of elastic stresses with optical system for measuring the substrate curvature in growth of III-N heterostructures by molecular-beam epitaxy

Crossref DOI link: https://doi.org/10.1134/S1063785017030130

Published Online: 2017-04-18

Published Print: 2017-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Zolotukhin, D. S.

Nechaev, D. V.

Ivanov, S. V.

Zhmerik, V. N.
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