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Low-Energy Defectless Dry Etching of the AlGaN/AlN/GaN HEMT Barrier Layer

Crossref DOI link: https://doi.org/10.1134/S1063785018050218

Published Online: 2018-06-22

Published Print: 2018-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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