Surface Topography and Optical Properties of Thin AlN Films Produced on GaAs (100) Substrate by Reactive Ion-Plasma Sputtering
Crossref DOI link: https://doi.org/10.1134/S1063785019030076
Published Online: 2019-05-06
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Fomin, E. V.
Bondarev, A. D.
Rumyantseva, A. I.
Maurer, T.
Pikhtin, N. A.
Tarasov, S. A.
Text and Data Mining valid from 2019-03-01
Article History
Received: 16 October 2018
Revised: 3 December 2018
Accepted: 12 December 2018
First Online: 6 May 2019