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Surface Topography and Optical Properties of Thin AlN Films Produced on GaAs (100) Substrate by Reactive Ion-Plasma Sputtering

Crossref DOI link: https://doi.org/10.1134/S1063785019030076

Published Online: 2019-05-06

Published Print: 2019-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Fomin, E. V.

Bondarev, A. D.

Rumyantseva, A. I.

Maurer, T.

Pikhtin, N. A.

Tarasov, S. A.
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Article History

Received: 16 October 2018

Revised: 3 December 2018

Accepted: 12 December 2018

First Online: 6 May 2019