Studying the Composition and Phase State of Thin PZT Films Obtained by High-Frequency Magnetron Sputtering under Variation of Working Gas Pressure
Crossref DOI link: https://doi.org/10.1134/S1063785019030258
Published Online: 2019-05-06
Published Print: 2019-03
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dolgintsev, D. M.
Pronin, V. P.
Kaptelov, E. Yu.
Senkevich, S. V.
Pronin, I. P.
Text and Data Mining valid from 2019-03-01
Article History
Received: 6 December 2018
Revised: 6 December 2018
Accepted: 11 December 2018
First Online: 6 May 2019