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Specific Features of the Pyroelectric Effect in Epitaxial Aluminum Nitride Layers Obtained on Si Substrates

Published Online: 2020-05-01

Published Print: 2020-01

Authors

Gavrilov, G. A.

Muratikov, K. L.

Panyutin, E. A.

Sotnikova, G. Yu.

Sharofidinov, Sh. Sh.
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Text and Data Mining valid from 2020-01-01

Version of Record valid from 2020-01-01
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Article History

Received: 16 September 2019

Revised: 30 September 2019

Accepted: 2 October 2019

First Online: 1 May 2020

CONFLICT OF INTEREST

: The authors state that they have no conflict of interest.

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