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Influence of Target Temperature on the Formation of a Nanorelief under Irradiation with Gas Cluster Ions

Published Online: 2020-06-15

Published Print: 2020-05

Authors

Kireev, D. S.

Ieshkin, A. E.

Shemukhin, A. A.
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Text and Data Mining valid from 2020-05-01

Version of Record valid from 2020-05-01
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Article History

Received: 28 August 2019

Revised: 31 January 2020

Accepted: 6 February 2020

First Online: 15 June 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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