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Epitaxial Growth of Bulk Semipolar AlN Films on Si(001) and Hybrid SiC/Si(001) Substrates

Published Online: 2020-07-18

Published Print: 2020-06

Authors

Kukushkin, S. A.

Osipov, A. V.

Redkov, A. V.

Sharofidinov, Sh. Sh.
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Text and Data Mining valid from 2020-06-01

Version of Record valid from 2020-06-01
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Article History

Received: 3 March 2020

Revised: 3 March 2020

Accepted: 10 March 2020

First Online: 18 July 2020

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

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