Crossmark

Impact of Pulsed Atmospheric-Pressure Glow Discharge on Nanometer-Thick Aluminum Films

Published Online: 2021-12-13

Published Print: 2021-03

Authors

Emelyanov, O. A.

Plotnikov, A. P.

Feklistov, E. G.
License Information

Text and Data Mining valid from 2021-03-01

Version of Record valid from 2021-03-01
More Information

Article History

Received: 4 September 2020

Revised: 26 November 2020

Accepted: 2 December 2020

First Online: 13 December 2021

CONFLICT OF INTEREST

: The authors declare that they have no conflict of interest.

Document is current