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Ion Synthesis of Silicon-on-Insulator Structures with a Lead-Silicate Insulating Layer

Published Online: 2021-12-20

Published Print: 2021-09

Authors

Buchin, E. Yu.

Denisenko, Yu. I.
License Information

Text and Data Mining valid from 2021-09-01

Version of Record valid from 2021-09-01
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Article History

Received: 19 March 2021

Revised: 13 April 2021

Accepted: 27 April 2021

First Online: 20 December 2021

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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