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Mechanical Properties of Epilayers of Metastable α- and ε-Ga2O3 Phases Studied by Nanoindentation

Published Online: 2021-12-20

Published Print: 2021-10

Authors

Guzilova, L. I.

Grashchenko, A. S.

Butenko, P. N.

Chikiryaka, A. V.

Pechnikov, A. I.

Nikolaev, V. I.
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Text and Data Mining valid from 2021-10-01

Version of Record valid from 2021-10-01
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Article History

Received: 3 March 2021

Revised: 6 April 2021

Accepted: 7 April 2021

First Online: 20 December 2021

CONFLICT OF INTEREST

: The authors declare that they have no conflicts of interest.

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