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Atomic Force Microscopy Study of the Physical Properties of Aluminum Nitride Thin Films

Published Online: 2025-07-20

Published Print: 2025-01

Authors

Strunin, V. I.

Baranova, L. V.

Davletkil’deev, N. A.

Kuklev, A. Yu.

Chirikov, N. A.
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Text and Data Mining valid from 2025-01-01

Version of Record valid from 2025-01-01
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Article History

Received: 14 October 2024

Revised: 8 December 2024

Accepted: 8 December 2024

First Online: 20 July 2025

CONFLICT OF INTEREST

: The authors of this work declare that they have no conflicts of interest.

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