Specific features of the formation of oblique texture in aluminum nitride films
Crossref DOI link: https://doi.org/10.1134/S1064226917090157
Published Online: 2017-10-21
Published Print: 2017-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Luzanov, V. A.
Text and Data Mining valid from 2017-10-01
Version of Record valid from 2017-10-01
Article History
Received: 6 October 2016
First Online: 21 October 2017